| 摘要 |
The present invention relates to a transfer vehicle with an air cleaning function, capable of preventing dust from penetrating into a cassette receiving a mask used in a semiconductor manufacturing process and enabling its safe transfer. The transfer vehicle comprises: an upper frame; a mounting unit installed in an upper frame having a plurality of cassettes mounted thereon; an air cleaning unit purifying minute dusts, and installed in a side of the upper frame; a lower frame located on a lower part of the upper frame; a caster unit installed in the lower part of the lower frame; and a battery installed in the lower frame, supplying power to drive the air cleaning unit. |
