| 摘要 |
The present invention relates to a planarizing apparatus and more specifically, to the planarizing apparatus which planarizes a plate by heating the plate. According to the present invention, disclosed is the planarizing apparatus which includes: a bottom chamber (100) which has a top side open; a side chamber (200) which is installed on the top side of the bottom chamber (100) and is opened up and down; a top chamber (300) which is installed on a top side of the side chamber (200) and forms a heating space separated from the outside together with the side chamber (200); a plurality of planarizing parts which is installed in an internal space formed by the bottom chamber (100), the side chamber (200) and the top chamber (300), and planarizes a plurality of planarization targets by supporting the planarization targets up and down sequentially in an interval; and heating parts(121, 122, 123) which are installed in the internal space, and planarize the planarization targets by heating the planarization targets. |
