| 摘要 |
In this surface shape measurement device, through triangulation using a light beam (116), a displacement gauge (100) measures the displacement of the surface of an object being measured (130). In a first measurement, while consecutively measuring the object being measured (130) using the displacement gauge (100), a measurement control unit (156) scans the light beam (116) in a direction intersecting with an edge of the object being measured (130) by moving the displacement gauge (100) and object being measured (130) in relation to each other. In a second measurement, in a state in which the orientation of the displacement gauge (100) has been rotated 180 degrees from the orientation of the first measurement with the light beam (116) as the axis of rotational symmetry, the measurement control unit (156) consecutively measures the same positions as in the first measurement using the displacement gauge (100). An edge specification unit (160) specifies the edge position on the basis of the divergence start point at which the measurement values of the first measurement and second measurement start to diverge. |
