| 摘要 |
<p>An objective is to provide a microchip capable of preventing leakage of a reagent or the like by filling in the space between substrates in the vicinity of an opening portion formed in a microchip. Therefore, a microchip is fitted with microchip substrate 10 and microchip substrate 14. Microchip substrate 10 possesses fine flow path 11 in the form of a groove, and a through-hole, and microchip substrate 10 and microchip substrate 14 are attached to each other to prepare a microchip. Opening portion 12 is connected to fine flow path 11, and the reagent or the like is introduced or discharged via opening portion 12. Dielectric film 13 is formed on the inner surface of opening portion 12. an SiO 2 film or a TiO 2 film is employed as dielectric film 13.</p> |
