Waveguide-integrated plasmonic resonator for integrated SERS measurements

摘要

A resonator structure is disclosed. In some embodiments, the resonator structure may include a metal-insulator-metal waveguide comprising a first metal layer, a second metal layer, and an insulating layer between the first metal layer and the second metal layer, wherein the insulating layer comprises a resonating cavity. The resonator structure may further include a mirror formed in the resonating cavity, wherein the mirror comprises at least one nanoscale metallic reflector positioned at least partly in the insulating layer.

主权项

1. A surface-enhanced Raman scattering (SERS) system comprising:
a high index contrast dielectric waveguide; and a resonator structure for supporting radiation in a resonating cavity, the resonator structure comprising:
a metal-insulator-metal (MIM) waveguide comprising a first metal layer, a second metal layer, and an insulating layer between the first metal layer and the second metal layer,at least two nanoscale metallic reflectors positioned at least partly in the insulating layer and forming at least two mirrors of the resonating cavity in the insulating layer, andintegrated dispersive optics for coupling surface plasmons from the resonator structure to the high index contrast dielectric waveguide.