Temperature controlled acoustic resonator

摘要

An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.

主权项

1. An acoustic resonator device, comprising:
an acoustic resonator positioned over a trench formed in a substrate; a heater coil disposed around an outer perimeter of the acoustic resonator, the heater coil comprising a resistor configured to receive a heater current; a heat sensor configured to adjust the heater current in response to a temperature of the heater coil; and a plurality of tethers connected to the acoustic resonator, the plurality of tethers being configured to limit transfer of externally applied forces to the acoustic resonator, wherein each tether includes a plurality of lever arms extending along a portion of a circumference of the acoustic resonator, wherein a first tether of the plurality of tethers comprises a first conductive trace for providing the heater current to the heater coil.