Method and apparatus for testing a semiconductor device

摘要

Provided is an apparatus for testing a semiconductor device. The apparatus includes a plurality of testing pads. The apparatus includes a plurality of testing units. The apparatus includes a switching circuit coupled between the testing pads and the testing units. The switching circuit contains a plurality of switching devices. The apparatus includes a control circuit coupled to the switching circuit. The control circuit is operable to establish electrical coupling between a selected testing unit and one or more of the testing pads by selectively activating a subset of the switching devices.

主权项

1. A semiconductor testing apparatus, comprising:
a first number of testing pads; a second number of testing units, wherein each testing unit is a respective semiconductor circuit element, and wherein the second number is greater than the first number; a switching circuit coupled between the testing pads and the testing units, the switching circuit containing a plurality of switching devices; and a control circuit coupled to the switching circuit, the control circuit containing a plurality of storage elements, the control circuit being operable to establish electrical coupling between a selected testing unit and one or more of the testing pads by selectively activating a subset of the switching devices in a manner such that the testing units are electrically isolated from one another and such that the testing units share access to at least a common set of the testing pads in a time-divided manner, wherein the storage elements are driven by a clock signal having a plurality of pulses, and wherein at each pulse of the clock signal, the control circuit activates a different one of the testing units to have sole access to the test pads through the respective switching devices coupled thereto.