| 摘要 |
The present invention is to accurately apply a coating material to the inside of a bank formed on a substrate. A coating device comprises a first photographer unit photographing a substrate disposed on a stage; a second photographer unit photographing the substrate disposed on the stage with more narrow angle-of-view and higher resolution than the first photographer unit; and a control unit which performs a pre-alignment treatment to photograph a circular pre-alignment mark formed on the substrate by using the first photographer unit, and to perform a location fitting operation on the substrate by controlling a movement mechanism and a rotation mechanism based on the photographed image, and performs a fine-alignment treatment to photograph a circular fine-alignment mark formed on the substrate by using the second photographer unit after the pre-alignment treatment, and to perform the location fitting operation on the substrate by controlling the movement mechanism and the rotation mechanism based on the photographed image. |
