| 发明名称 | Charged particle lithography system with sensor assembly | ||
| 摘要 | The invention relates to a charged particle lithography system for transferring a pattern onto a target, said system comprising:;a target positioning device comprising a target holder having a first side for holding the target,;a charged particle optical unit for generating a charged particle beam, modulating said charged particle beam, and directing said charged particle beam towards the first side of the target holder, and;a sensor assembly comprising a converter element for converting charged particles which impinge on said converter element into light, wherein the converter element is arranged on said target positioning device, a light sensor for detecting the light, wherein the light sensor is arranged at a distance from said target positioning device, and a light optical lens which is arranged between the converter element and the light sensor for directing light originating from said converter element to said sensor. | ||
| 申请公布号 | US9153415(B2) | 申请公布日期 | 2015.10.06 |
| 申请号 | US201414581728 | 申请日期 | 2014.12.23 |
| 申请人 | MAPPER LITHOGRAPHY IP B.V. | 发明人 | Scheffers Paul IJmert |
| 分类号 | G21K5/10;G21K5/00;G21K4/00;H01J37/22;H01J37/20 | 主分类号 | G21K5/10 |
| 代理机构 | Blakely Sokoloff Taylor & Zafman LLP | 代理人 | Blakely Sokoloff Taylor & Zafman LLP |
| 主权项 | 1. Charged particle lithography system for transferring a pattern onto a target, said system comprising: a target positioning device comprising a target holder having a first side for holding the target, a charged particle optical unit for generating a charged particle beam, modulating said charged particle beam, and directing said charged particle beam towards the first side of the target holder, and a sensor assembly comprising a converter element for converting charged particles which impinge on said converter element into light, wherein the converter element is arranged on said target positioning device, a light sensor for detecting the light, wherein the light sensor is arranged at a distance from said target positioning device, and a light optical lens which is arranged between the converter element and the light sensor for directing light originating from said converter element to said sensor. | ||
| 地址 | Delft NL | ||