发明名称 High damage threshold frequency conversion system
摘要 The present invention includes a fundamental laser light source configured to generate fundamental wavelength laser light, a first nonlinear optical crystal configured to generate first alternate wavelength light, a second nonlinear optical crystal configured to generate second alternate wavelength light, a dual wavelength Brewster angle waveplate configured to rotate a polarization of the first alternate wavelength light relative to the second alternate wavelength light such that the first and second alternate wavelength light have the same polarization, a set of Brewster angle wavefront processing optics configured to condition the first and second alternate wavelengths of light, a harmonic separator configured to separate the first alternate wavelength light from the second alternate wavelength light, and a Brewster angle output window configured to transmit the first or second alternate wavelengths of light from the interior of a laser frequency conversion system to the exterior of the laser frequency conversion system.
申请公布号 US9152008(B1) 申请公布日期 2015.10.06
申请号 US201414245020 申请日期 2014.04.04
申请人 KLA-Tencor Corporation 发明人 Armstrong J. Joseph
分类号 G02F1/35;G02F1/37;H01S3/109;H01S3/10;G02B27/28 主分类号 G02F1/35
代理机构 Suiter Swantz pc llo 代理人 Suiter Swantz pc llo
主权项 1. An apparatus for laser frequency conversion having a high damage threshold, comprising: a fundamental laser light source configured to generate fundamental wavelength laser light; a first nonlinear optical crystal configured to receive fundamental laser light from the fundamental laser light source, the first nonlinear optical crystal configured to generate first alternate wavelength light by frequency converting at least a portion of the received fundamental laser light to first alternate wavelength light; a second nonlinear optical crystal configured to receive first alternate wavelength light from the first nonlinear optical crystal, the second nonlinear optical crystal configured to generate second alternate wavelength light by frequency converting at least a portion of the received first alternate wavelength light to second alternate wavelength light; a dual wavelength Brewster angle waveplate configured to receive first alternate wavelength light and second alternate wavelength light emanating from the second nonlinear optical crystal, the dual wavelength Brewster angle waveplate further configured to rotate a polarization of the first alternate wavelength light relative to the second alternate wavelength light such that the first alternate wavelength light and the second alternate wavelength light have substantially the same polarization; a set of Brewster angle wavefront processing optics configured receive first alternate wavelength light and second alternate wavelength light from the dual wavelength Brewster angle waveplate, the set of Brewster angle wavefront processing optics further configured to condition the first alternate wavelength light and second alternate wavelength light emanating from the dual wavelength Brewster angle waveplate; and a harmonic separator configured to receive the first alternate wavelength light and the second alternate wavelength light from the set of Brewster angle wavefront processing optics, the harmonic separator configured to at least partially separate the first alternate wavelength light from the second alternate wavelength light.
地址 Milpitas CA US