Back scattered electron detector

摘要

It is an object of the present invention to provide a back scattered electron detector suitable for implementing a method for determining beforehand in which region of a sample an X-ray detector can obtain an accurate X-ray detection image and perform an appropriate analysis. A Coax-BSE detector which is a back scattered electron detector includes a BSE element, a support member that supports the BSE element, and a fixing member to fix the support member to the X-ray detector, in which the fixing member fixes the support member by clamping a side portion on the distal end side which is an X-ray receiving side of a housing that covers the X-ray detector.

主权项

1. A back scattered electron detector used together with an X-ray detector included in a charged particle beam apparatus, the charged particle beam apparatus including an another back scattered electron detector arranged between an electron source and a sample and, as seen from the sample, the another back scattered electron detector being arranged on same side as the X-ray detector at a different angle than the X-ray detector, comprising:
a reflected electron detection element; a support member that supports the reflected electron detection element; and a fixing member for fixing the support member to the X-ray detector, wherein the fixing member fixes the support member by clamping a side portion on a distal end side, which is an X-ray receiving side, of a housing that covers the X-ray detector.