3D RF MEMS biosensor for multiplexed label free detection

摘要

A label-free RF MEMS-based biosensor is described for detecting biomarkers in a given environment. The biosensor is capable of sensing the presence of biomarkers by exploiting both its mechanical and electrical characteristics. In addition, the method employed for detecting mechanical deflections due to antigen-antibody binding uses a simple electrical circuitry which allows the sensor to be used at any location and time. Such a sensor, when placed in a matrix like structure allows for the detection of multiple biomarkers simultaneously.

主权项

1. An RF MEMS based biosensor with two sensing modes comprising:
a) a non conductive substrate; b) parallel, spaced-apart electrically conductive ground lines situated atop said substrate; c) a bottom electrode comprising a conductive signal line positioned between said spaced-apart ground lines, said signal line aligned in parallel to said ground lines; d) a dielectric layer which covers said signal line; e) a top electrode comprising a flexible rectangular membrane having a top surface and a bottom surface, said membrane suspended above a portion of said dielectric layer covered signal line so as to define a gap between them, said flexible membrane at each end supported by and in electrical contact with said spaced apart ground lines; and, f) a coating of biorecognition elements disposed on said dielectric layer covered signal line, and the top surface of said flexible membrane.