Atomic force microscopy of scanning and image processing

摘要

A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.

主权项

1. A method for measuring topography, the method comprising:
scanning a surface of a structure to produce image data representing a profile of the surface including a first surface feature of the structure and also including a different second surface feature of the structure; manipulating the image data to align the first surface feature of the profile with a first axis of a first coordinate system; and manipulating the image data to align the second surface feature of the profile with a different second axis of the first coordinate system.