| 摘要 |
PROBLEM TO BE SOLVED: To separate, in particular, vibration between a vacuum pump and a receiver, and also electrically separate vibration and obtain vacuum air-tightness connection by a simple and inexpensive method.SOLUTION: In a vacuum pump damper for vacuum air-tightly connecting a vacuum pump 10 and a receiver 12, a first flange 20 is connected to the vacuum pump 10 and a second flange 22 is connected to the receiver 12. At least one separation apparatus 26 is directly arranged between flange faces 24, 24' of the first and second flanges 20, 22 faced to each other. The first and second flanges 20, 22 are connected to each other by at least one fixing element 28, in particular a screw. A pre-load is applied so that both of the flanges 20, 22 are mechanically and/or electrically separated from each other in an operating state that the fixing element 28 and the flanges 20, 22 are vacuumed, and so that the separation apparatus 26 is vacuum air-tight in an assembled state that the flanges are not vacuumed. |
