| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a calibration method of a measurement instrument and a device thereof which allow simultaneous acquisition of optimal calibration values of an arm length and a stylus height.SOLUTION: A measurement range for a ball gauge is divided into a plurality of stages (upper side, center, and lower side) in a height direction, and the ball gauge is traced by a stylus 14 to obtain three pieces of measurement data 1, 2, and 2 of the ball gauge, which are different in measurement range in the height direction. A front end radius value of the stylus 14 is temporarily calibrated by the pieces of measurement data 1, 2, and 3 of the ball gauge and measurement data of a step gauge, and a preliminarily defined evaluation function is calculated, and optimization calculation is performed until the calculated value converges, whereby an arm length and a stylus height are simultaneously calibrated.</p> |
