| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent leakage of a plasma containing active species generated at a discharge part to make the plasma stay in a required region as long as possible.SOLUTION: An AC voltage is applied to a discharge part in which a discharge electrode 3 and a counter electrode 4 are arranged opposedly via a dielectric body 5 to generate a plasma. An inductor 6 having a closed magnetic path that makes a magnetic field act on the plasma containing active species generated at the discharge part to form a flow channel of a plasma current is arranged in the vicinity of the discharge part. A power supply 8 for an inductor applies an AC voltage to a coil 17 of the inductor 6 to generate a magnetic field at the closed magnetic path of the core 16 and its circumference. Thereby, a plasma current in which the active species of the plasma aggregate reflows via the flow channel and stays as a standing wave so that the inductor for generating the magnetic field becomes electrically neutral.</p> |
