发明名称 DISPLAY DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a high performance thin film transistor excellent in reliability, and to provide a highly reliable high performance display device using the same.SOLUTION: In a display device having a gate electrode formed on a substrate, a gate insulating film formed to cover the substrate and the gate electrode, an oxide semiconductor layer formed on the gate electrode via the gate insulating film, a channel protection film formed on the oxide semiconductor layer in contact therewith, and a source-drain electrode connected electrically with the oxide semiconductor layer, and formed to cover the oxide semiconductor layer, a metal oxide layer is formed on the channel protection film, and the source-drain electrode is formed so as to be divided on the channel protection film and metal oxide layer.
申请公布号 JP2015177105(A) 申请公布日期 2015.10.05
申请号 JP20140053604 申请日期 2014.03.17
申请人 JAPAN DISPLAY INC 发明人 UEMURA NORIHIRO;SUZUMURA ISAO;MIYAKE HIDEKAZU;YAMAGUCHI YOHEI
分类号 H01L21/336;H01L21/28;H01L29/786 主分类号 H01L21/336
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