| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an oxide-coated carbon material which is used in trays of heat treatment apparatuses in powder metallurgy sintering steps for production of e.g. super steel, semiconductor production apparatus members, etc., surface-covered with an oxide, is resistant to detachment and is enhanced in coating adhesion.SOLUTION: A solution of a thermosetting resin is permeated into the surface layer of a carbon material, and the carbon material is heated to harden the thermosetting resin. The carbon material is then subjected to a high-temperature heat treatment to convert the impregnation layer of the thermosetting resin to a glass-like carbon-impregnated layer. An oxide is flame-sprayed onto the glass-like carbon-impregnated layer to form an oxide film. The surface strength of the carbon material is enhanced by the glass-like carbon-impregnated layer, suppressing detachment of surface particles and free aggregate of the carbon material and detachment of the oxide film.</p> |
