发明名称 TWO-STEP DEPOSITION WITH IMPROVED SELECTIVITY
摘要 A method for providing an electroless plating over at least one copper containing layer is provided. Surfaces of the at least one copper containing layer are sealed by selectively depositing a sealing layer of catalytically active metal on the at least one copper containing layer. The sealing layer is exposed to an electroless deposition bath that is more reactive to the catalytically active metal than to the at least one copper containing layer to provide an electroless deposition on the sealing layer.
申请公布号 KR20150111326(A) 申请公布日期 2015.10.05
申请号 KR20150041616 申请日期 2015.03.25
申请人 LAM RESEARCH CORPORATION 发明人 KOLICS ARTUR;NALLA PRAVEEN;VARADARAJAN SESHASAYEE
分类号 H01L21/3205;H01L21/768 主分类号 H01L21/3205
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