THE HYBRID ESC AND METHOD OF FABRICATING THE SAME

摘要

The present invention provides a hybrid electrostatic chuck (ESC), and a manufacturing method thereof. The hybrid ESC comprises: an upper structure containing Al_2O_3 capable of seating a substrate on a top and a lower structure containing titanium (Ti) or a titanium alloy; braze-joined by placing a filter on the upper structure; and having a flow passage wherein a fluid cooling the substrate flows. At least two thermal conductive layers are braze-joined to the lower structure.