| 摘要 |
The present invention provides an apparatus for manufacturing a specimen of an organic light emitting diode device. The apparatus includes: a deposition chamber including a first deposition chamber, a second deposition chamber, and a gate, which makes the first deposition chamber and the second deposition chamber communicate with each other; a ventilation device which makes vacuum atmospheres in the first deposition chamber and the second deposition chamber which communicate with each other; a first chucking device and a second chucking device which support substrates in the first deposition chamber and the second deposition chamber, respectively; multiple first crucibles, which supply an organic material to the first deposition chamber, and multiple second crucibles, which supply metal to the second deposition chamber; and a glove box which is connected to the deposition chambers and includes an encapsulation chamber for an encapsulation process and gloves to enable a worker to participate in the encapsulation process. |
