CELL TYPE PANEL FIXING DEVICE FOR SPUTTERING

摘要

The present invention relates to an apparatus to fixate a cell type panel for sputtering capable of preventing a thin film formed on a surface of a cell type panel from spreading by sputtering. Moreover, the apparatus to fixate a cell type panel for sputtering comprises: a front cover to support a front surface of a plurality of cell type panels, including a plurality of mounting grooves to accommodate the cell type panel respectively, and including a first slit passing through a front and a rear surface inside an edge part of each mounting groove; a plurality of rear covers to support the rear surface of the plurality of cell type panels respectively, and including a plurality of first magnetic bodies arranged at a distance in the edge part; and a plurality of masks arranged between the front cover and the rear cover, including a second slit corresponding to the first slit.