CAPACITIVE STATIC AND DYNAMIC SENSOR

摘要

A capacitive pressure sensor may be configured to transduce both a dynamic pressure and a static pressure using a single diaphragm. A capacitive pressure sensor may comprise a dynamic excitation signal module in parallel with a static excitation signal module, a summing amplifier module in connection with both the dynamic excitation module and the static excitation module, a dynamic charge amplifier stage in a parallel with a static charge amplifier stage, and a capacitive sensor connected to an output of the summing amplifier module, as well as an input of the dynamic charge amplifier stage, and an input of the static charge amplifier stage. Further, a dynamic excitation signal may be provided by the dynamic excitation signal module as a constant DC voltage signal, and a static excitation signal may be provided by the static excitation signal module as an AC voltage signal.

主权项

1. A capacitive pressure sensor comprising:
a dynamic excitation signal module in parallel with a static excitation signal module; a summing amplifier module in connection with both the dynamic excitation signal module and the static excitation signal module; a dynamic charge amplifier stage in parallel with a static charge amplifier stage; and a capacitive sensor connected to an output of the summing amplifier module, wherein the capacitive sensor is connected to an input of the dynamic charge amplifier stage, and wherein the capacitive sensor is connected to an input of the static charge amplifier stage.