CURVATURE MEASUREMENT APPARATUS AND METHOD

摘要

A curvature measurement apparatus according to an embodiment includes: a laser beam emitting portion emitting a laser beam; a first polarization beam splitter separating the emitted laser beam into first and second laser beams in different polarization directions and in different travel directions; a mirror reflecting the first laser beam so that the first and second laser beams travel side by side to a substrate; a second polarization beam splitter transmitting the second laser beam mirror-reflected from the substrate and reflecting the first laser beam, mirror-reflected from the substrate, in a direction different from a travel direction of the second laser beam; a one-dimensional first position detection device detecting an incident position of the reflected first laser beam on the first position detection device; and a one-dimensional second position detection device detecting an incident position of the transmitted second laser beam on the second position detection device.

主权项

1. A curvature measurement apparatus, comprising:
a light emitting portion configured to emit a laser beam; a first polarization beam splitter configured to separate the laser beam emitted from the light emitting portion into a first laser beam and a second laser beam which are in different polarization directions and in different travel directions; a reflection portion configured to reflect any one of the first and second laser beams so that the first and second laser beams travel side by side to a measurement object; a second polarization beam splitter configured to transmit any one of the first and second laser beams mirror-reflected from the measurement object, and to reflect the other laser beam in a direction different from a travel direction of the one laser beam; a one-dimensional first position detection device configured to detect an incident position where the first laser beam reflected from or transmitted through the second polarization beam splitter is incident on the first position detection device; and a one-dimensional second position detection device configured to detect an incident position where the second laser beam transmitted through or reflected from the second polarization beam splitter is incident on the second position detection device.