发明名称 ANGULAR ACCELERATION SENSOR AND ACCELERATION SENSOR
摘要 An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.
申请公布号 US2015274504(A1) 申请公布日期 2015.10.01
申请号 US201514736327 申请日期 2015.06.11
申请人 Murata Manufacturing Co., Ltd. 发明人 KITAI Masahiro;ICHIMARU Masayuki
分类号 B81B3/00;G01P15/08;G01P15/12 主分类号 B81B3/00
代理机构 代理人
主权项 1. (canceled)
地址 Nagaokakyo-shi JP
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