发明名称 |
PHYSICAL QUANTITY SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT |
摘要 |
A physical quantity sensor includes a diaphragm which is able to be bent and deformed; and a bending amount element, provided in the diaphragm, which outputs a signal based on the amount of bending of the diaphragm. The bending amount element includes a center side element which is provided closer to the center of the diaphragm and an edge portion side element which is provided closer to an edge portion of the diaphragm than the center side element. |
申请公布号 |
US2015276527(A1) |
申请公布日期 |
2015.10.01 |
申请号 |
US201514666859 |
申请日期 |
2015.03.24 |
申请人 |
Seiko Epson Corporation |
发明人 |
TAKEUCHI Junichi;KINUGAWA Takuya |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
1. A physical quantity sensor comprising:
a diaphragm which is able to be bent and deformed; and a bending amount element, provided in the diaphragm, which outputs a signal based on the amount of bending of the diaphragm, wherein the bending amount element includes a center side element which is provided closer to the center of the diaphragm and an edge portion side element which is provided closer to an edge portion of the diaphragm than the center side element. |
地址 |
Tokyo JP |