| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device of a plate-like body which eliminates unnecessary resources and costs in a unit sheet formed by a film body, an intermediate sheet, and an adsorption sheet, and to provide a polishing method of the plate-like body which uses the polishing device.SOLUTION: In a unit sheet 230 of a polishing device 10 of the invention, a lower surface of an intermediate sheet 210 is bonded to an upper surface of an adsorption sheet 200 and an entire upper surface of the intermediate sheet 210 is detachably attached to a lower surface of a film body 38 through a hook-and-loop fastener 220. Thus, when the adsorption sheet 200 or the intermediate sheet 210 to which the adsorption sheet 200 is bonded is damaged, the hook-and-loop fastener 220 is peeled to remove the intermediate sheet 210 from the film body 38 and a new adsorption sheet 200 and a new intermediate sheet 210 are attached to the film body 38 by the hook-and-loop fastener 220. Similarly, when the film body 38 is damaged, the hook-and-loop fastener 220 is peeled to remove the film body 38 from the intermediate sheet 210, and a new film body 38 is attached to the intermediate sheet 210 by the hook-and-loop fastener 220. |
