| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface shape measurement device that enables a simple configuration to measure an inspected surface of a measurement object without requiring force control of a displacement sensor performing a shape detection of the inspected surface of the measurement object.SOLUTION: A surface shape measurement device 10 includes a holder 20 that has three legs 30, 40 and the like in point contact with an inspected surface 100a of a measurement object 100, and in the holder 20, a displacement sensor 60 is provided so as to be located between the two legs 30 and 40 separated from each other in a scanning direction upon measuring and measures a shape of the inspected surface 100a. The surface shape measurement device 10 includes a rigid member 70 that is coupled to the holder 20 via an elastic coupling member 80, which drags the holder in a state where the coupling member is coupled to the rigid member 70 during a relative movement of the holder 20 and the measurement object 100 in the scanning direction, and absorbs oscillation from the rigid member 70.</p> |
