| 发明名称 |
CAP MODULE FOR MICRO ELECTRO MECHANICAL SYSTEM AND MICRO ELECTRO MECHANICAL SYSTEM SENSOR HAVING THE SAME |
| 摘要 |
Embodiments of the invention provide a cap module for MEMS including a substrate, a first negative photoresist, which is formed on one surface of the substrate, and a second negative photoresist, which is formed on one surface of the first negative photoresist. |
| 申请公布号 |
US2015274510(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201414265760 |
申请日期 |
2014.04.30 |
| 申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
LEE Jae Chang;SONG Jong Hyeong;KIM Jong Woon;LEE Hyun Kee |
| 分类号 |
B81B7/00 |
主分类号 |
B81B7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A cap module for MEMS, comprising:
a substrate; a first negative photoresist which is formed on one surface of the substrate; and a second negative photoresist which is formed on one surface of the first negative photoresist. |
| 地址 |
Gyeonggi-Do KR |
