APPARATUS FOR SUPPLYING SUPPORT AND APPARATUS FOR MANUFACTURING STACK

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for supplying a support having a clean surface and an apparatus for manufacturing a stack including a support and a remaining portion of a processed member whose surface layer is peeled.SOLUTION: An alignment portion, a slit formation portion, and a peeling portion are included. The alignment portion is provided with a first transfer mechanism of a stacked film including a support and a separator and a table for fixing the stacked film. The slit formation portion is provided with a cutter to form a slit with the separator remaining. The peeling portion is provided with a second transfer mechanism and a peeling mechanism to extend the separator and then peel it. In addition, a pretreatment portion to activate a support surface is also included.