SEMICONDUCTOR WAFER TRANSFER APPARATUS AND SOLAR CELL MANUFACTURING METHOD USING SAME

摘要

A flat first suction surface (14a) and a flat second suction surface (14b) for sucking a semiconductor wafer are disposed on the upper surface side of a first arm (10a) and a second arm (10b), respectively. A connecting member (12) connects together one side end of the first arm (10a) and one side end of the second arm (10b). The first suction surface (14a) and the second suction surface (14b) of respective first arm (10a) and second arm (10b) are sloped such that the inner sides facing each other are lower than the outer sides that are on the sides opposite to the inner sides.