| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a target for precise measurement capable of being used as a reference mark or a survey point for performing precise measurement, and provide a precise measurement method.SOLUTION: A target 1 for precise measurement is used for performing measurement in sub-millimeter for arranging a device at a position previously determined at a precision to sub-millimeter, and includes a square sheet 2. A circular mark 3 having a diameter of 0.1 millimeter or more and less than 0.5 millimeter, and a plurality of groups of two parallel lines 11a and 11b, two parallel lines 12a and 12b, two parallel lines 13a and 13b, and two parallel lines 14a and 14b that are arranged so that the intervals gradually become narrow toward the mark 3 are disposed on one surface of the sheet 2.</p> |
