| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of a discharge port of a liquid droplet discharge device which can prevent occurrence of discharge failure occurring accidentally in a manufacturing process of a device.SOLUTION: In an inspection method of a discharge port of a liquid droplet discharge device 100 which discharges a liquid droplet at a predetermined drive frequency from a plurality of discharge ports 124d1, the liquid droplet is discharged at a drive frequency for inspection exceeding the predetermined drive frequency from each of the plurality of discharge ports 124d1, and the liquid droplet is adhered on a surface of an object 200. One or more items among an adhesion area, landing deviation, landing reproducibility of each of the adhered liquid droplets, an occurrence frequency of non-discharge from each of the discharge ports, satellite or two-droplets are measured. When a measurement result of the liquid droplet is out of a range of a standard of each item, the discharge port 124d1 which discharges the liquid droplet is determined as a defective discharge port. |
