| 发明名称 |
EMS DEVICE HAVING FLEXIBLE SUPPORT POSTS |
| 摘要 |
This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap. |
| 申请公布号 |
US2015277099(A1) |
申请公布日期 |
2015.10.01 |
| 申请号 |
US201414564851 |
申请日期 |
2014.12.09 |
| 申请人 |
QUALCOMM MEMS Technologies, Inc. |
发明人 |
Hong John Hyunchul;Ma Jian Jim;Wen Bing;Chang Tallis Young;Chan Edward Keat Leem;Hong Brandon John;Lavery Kristopher Andrew;Pan Yaoling;Kim Cheonhong |
| 分类号 |
G02B26/00;G06T1/20 |
主分类号 |
G02B26/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electromechanical systems apparatus comprising:
a substrate; a stationary electrode over the substrate; one or more flexible support posts over the substrate; and a movable electrode over the stationary electrode and supported by the one or more flexible support posts, the movable electrode configured to move across a gap between the movable electrode and stationary electrode upon electrostatic actuation, the one or more flexible support posts including a first organic material and configured to compress to permit the movable electrode to move across the gap |
| 地址 |
San Diego CA US |
