发明名称 OPTO-ELECTRIC INTEGRATED CIRCUIT AND OPTICAL INTERPOSER
摘要 An opto-electric integrated circuit includes an optical waveguide formed using a portion of an insulation layer on a silicon substrate to form a lower clad and using a portion of a semiconductor layer formed on the insulation layer to form a core. The opto-electric integrated circuit also includes an optical device connected to the optical waveguide, an electrical circuit connected to the optical device, a mesa-shaped connection section interconnecting the optical device and the electrical circuit, and an electrically conductive film formed in a region at least containing a flank surface of the connection section. The electrically conductive film is grounded while contacting the silicon substrate.
申请公布号 US2015277069(A1) 申请公布日期 2015.10.01
申请号 US201514666630 申请日期 2015.03.24
申请人 NEC Corporation ;FUJITSU LIMITED 发明人 OKAMOTO Daisuke;URINO Yutaka;USUKI Tatsuya
分类号 G02B6/42 主分类号 G02B6/42
代理机构 代理人
主权项 1. An opto-electric integrated circuit, comprising: an optical waveguide formed using a portion of an insulation layer on a silicon substrate to form a lower clad and using a portion of a semiconductor layer formed on the insulation layer to form a core; an optical device connected to the optical waveguide; an electrical circuit connected to the optical device; a mesa-shaped connection section interconnecting the optical device and the electrical circuit; and an electrically conductive film formed in a region at least containing a flank surface of the connection section; the electrically conductive film being grounded while contacting the silicon substrate.
地址 Tokyo JP