INFRARED RAY DETECTION ELEMENT AND INFRARED RAY DETECTION DEVICE EQUIPPED THEREWITH

摘要

This infrared ray detection element (25) is provided with: a substrate (11) having a cavity (13); an infrared ray detection part (20) in which a lower electrode layer (40), a detection layer (16), and an upper electrode layer (50) are stacked in that order; a first support part (30A) and a second support part (30B) for supporting the infrared ray detection part (20) above the cavity (13); and a first outside lead part (60A) and a second outside lead part (60B), for leading a signal out from the infrared ray detection part (20). The first support part (30A) is provided with a first upper line (80A), a first insulating layer (16A), and a first lower line (70A), stacked in that order. The upper electrode layer (50) is connected to the first outside lead part (60A) through the first upper line (80A). The second support part (30B) is provided with a second upper line (80B), a second insulating layer (16B), and a second lower line (70B), stacked in that order. The lower electrode layer (40) is connected to the second outside lead part (60B) through the second lower line (70B).