发明名称 X-RAY DEVICE, X-RAY MEASUREMENT DEVICE AND STRUCTURE PRODUCTION METHOD
摘要 This X-ray device is provided with: an X-ray source that irradiates an object to be measured with an X-ray; an X-ray detector that acquires a transmission image of the X-ray that has passed through the object to be measured; a mount that is arranged between the X-ray source and the X-ray detector, and on which the object to be measured is mounted; and a calculating unit that calculates the mounting position at which the object to be measured should be mounted to the mount on the basis of structural information of the object to be measured.
申请公布号 WO2015145548(A1) 申请公布日期 2015.10.01
申请号 WO2014JP58105 申请日期 2014.03.24
申请人 NIKON CORPORATION 发明人 TAKEDA, SHINSUKE
分类号 G01N23/04 主分类号 G01N23/04
代理机构 代理人
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