BACK-ILLUMINATED DISTANCE MEASURING SENSOR AND DISTANCE MEASURING DEVICE

摘要

A back-illuminated distance measuring sensor comprising: a semiconductor substrate having a light incident surface and a surface opposed to the light incident surface; a photo gate electrode provided on the surface; a first gate electrode and a second gate electrode each of the first and second gate electrodes being provided adjacent to the photo gate electrode on the surface; and an electric field concentrated area positioned immediately under the photo gate electrode, the first gate electrode and the second gate electrode; a first semiconductor area and a second semiconductor area for respectively reading carriers from the electric field concentrated area, wherein the substrate has a first conductive type, wherein the electric field concentrated area has the first conductive type, wherein each of the first and second semiconductor areas has a second conductive type, wherein the electric field concentrated area has a higher impurity density than the impurity density of the semiconductor substrate.