Apparatus for film coating a substrate

摘要

Apparatus for film coating a substrate (2), with two cathodes (30,31) each connected to one pole of an alternating current source (15) and each in a separate compartment (4,12) forming a single vacuum chamber (3) together with a number of adjacent compartments (4 to 12') connected by a through-passage (32). The two compartments (4,12) with cathodes (30,31) connected to the current source (15) are separated by several compartments (5 to 11 and 5' to 10') at least partly equipped with an additional sputter cathode (33 to 38) each with separate current supply.