METHOD OF STABILIZING PLASMA GENERATION BY AN ELECTRON-BEAM EVAPORATOR,申请号EP19940904133-传众专利搜索

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发明名称	METHOD OF STABILIZING PLASMA GENERATION BY AN ELECTRON-BEAM EVAPORATOR
摘要
申请公布号	EP0685003(B1)	申请公布日期	1996.10.16
申请号	EP19940904133	申请日期	1994.01.13
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	KIRCHHOFF, VOLKER;GOEDICKE, KLAUS;METZNER, CHRISTOPH;SCHEFFEL, BERT
分类号	H01J37/30;C23C14/32;H01J37/304;H01J37/305;H05H1/00;(IPC1-7):C23C14/30;H05H1/42;H05H1/24;H01J37/32	主分类号	H01J37/30
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