BACK-ILLUMINATED DISTANCE MEASURING SENSOR AND DISTANCE MEASURING DEVICE

摘要

A back-illuminated distance measuring sensor comprising: a semiconductor substrate having a light incident surface and a surface opposed to the light incident surface; a photo gate electrode provided on the surface; a first and a second gate electrodes which are provided adjacent to the photo gate electrode on the surface; and a first and a second semiconductor areas for respectively reading carriers flown from an area immediately under the photo gate electrode into areas immediately under the first and the second gate electrodes, wherein the semiconductor substrate is comprised of Si, wherein the semiconductor substrate comprises a thin plate portion having a thickness in a range from 10µm to 100µm, and wherein the photo gate electrode, the first gate electrode, and the second gate electrode are provided to the thin plate portion.