SYSTEMS AND METHODS OF COMBINATORIAL SYNTHESIS

摘要

Disclosed are methods to synthesize new functional materials in an effective and efficient way. These methods include physical vapor deposition and laser-assisted epitaxial growth capable of synthesizing materials comprising a plurality of precursors with similar or dissimilar chemical and/or physical properties. The designated materials are formed during the combinatorial synthesis without the neccessity of post-deposition furnace heating to thermally activate simultaneous reaction and diffusion of precursor multilayers. Modulated photoreflectance spectroscopy may be used to screen regions of the library to assess deposition conditions.