| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source which has a small energy width and is operated in high angle current density. <P>SOLUTION: The electron source is composed of a (100) direction single crystal rod 1 of tungsten or molybdenum and has an electron emitting face with (100) crystal face exposed at one end part, and furthermore, has a diffusion source 2 containing one kind or more of a metal element oxide selected from a group of Ho, Gd, Nd, Sm or Pr. It is preferable that its operation temperature is 1,200 K or more and 1,500 K or less. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
