| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus where a color shading characteristic and a spectral characteristic can be improved without deteriorating a condensing rate and sensitivity of oblique incidence light, and to provide a manufacturing method of the apparatus and a camera. SOLUTION: Photodiodes 11 and charge reading parts (vertical CCD parts) 12 reading signal charges of the photodiodes are formed on a semiconductor substrate 10 by segmentation in units of pixels. Color filter parts (33G, 34R and 35B) and flattening films 36a are formed above the photodiodes. Microlenses 40a are formed on the upper layer. The color filter part is provided with at least a first color filter 33G having a first spectral characteristic and a second color filter 34R having a second spectral characteristic and having a projected square shape 34Ra projected to a flattening film-side at a boundary with the first color filter. A top surface of the projected square shape 34Ra is flattened at the same height as the upper face of the flattening film 36a. COPYRIGHT: (C)2008,JPO&INPIT
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