| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic connection-type sensor with a plane inductor, which surely detects a polishing terminal point with high accuracy by providing a sensor extremely suitable for detecting the polishing terminal point of a conductive film without generating noise and with low power consumption and reducing cost, and terminal point detecting method and device using the sensor. <P>SOLUTION: The sensor has an oscillation circuit 36 constituting a sensor circuit system constituted of a plane inductor 34 and a capacitor 35. By making the plane inductor 34 close to the conductive film having certain film thickness in parallel and causing electrostatic connection between the plane inductor 34 and the conductive film by the phase distribution, the sensor is oscillated by a resonance frequency determined by two changes of a change of a film thickness resistance value of the conductive film via the electrostatic connection, and a change of inductance viewed from the sensor circuit system by a magnetic field accompanied by a magnetic field change made by the plane inductor 34 and intrusion of the magnetic field into the conductive film. <P>COPYRIGHT: (C)2008,JPO&INPIT |
