Base or cover wafer for producing cavity for multiplicate component, has getter test array arranged such that getter test array comes to lie in cavity, where array exhibits small getter material surface than gas absorption array surface

摘要

The wafer (1) has multiple gas absorption arrays (2) that are covered with a uniform surface (3) on a getter material and arranged in such a manner that the gas absorption arrays come to lie in a cavity that is to be formed. A getter test array (4) is arranged in such a manner that the getter test array comes to lie in the cavity, where the getter test array exhibits a small getter material surface (5) than the gas absorption array surface. Another getter test array (6) is provided, where the getter test array (6) is free of getter material. An independent claim is also included for a method for checking a getter gas absorption capacity of a multiplicate component.