| 摘要 |
PROBLEM TO BE SOLVED: To appropriately lower the temperature of a pressure-receiving diaphragm and a sensor chip, in a pressure sensor for performing pressure detection by transmitting pressure received by the pressure-receiving diaphragm to the sensor chip through a pressure transmitting member. SOLUTION: The pressure sensor 100 is mounted on an engine 200 by inserting a hollow cylindrical metallic case 20 into a mounting hole 201 formed in the engine 200 where oil W circulates. Along with forming an oil passage 60 in the metallic case 20, passages 71, 72 for flowing the oil W are formed in a housing 30 too, and the portion between the engine 200 and the pressure sensor 100 is connected with an oil feeding piping member 81 and an oil feeding-back piping member 82. Consequently, by flowing the oil W inside the engine 200 into the hollow part of the metallic case 20, and returning it back to the engine 200, heat of the pressure-receiving diaphragm 10 and the sensor chip 40 is radiated through the medium of the oil W. COPYRIGHT: (C)2008,JPO&INPIT
|
