| 摘要 |
PROBLEM TO BE SOLVED: To provide a fastener for screwing a lamp inside a semiconductor processing reactor with easy screw exchanges but with a screw not inadvertently coming off. SOLUTION: The fastener 38 of a captured type capable of attaching a lamp inside a radiantly heated semiconductor processing reactor, is captured within an eyelet terminal 32 on each end of the lamp, thereby rotatably securing the fastener 38 to the lamp. The eyelet terminal 32 may have a threaded aperture which screws into a threaded part of the fastener 38. Alternatively, the terminal may be adapted with a tab, a conductor extension or a housing assembly which fold over the top of a fastener inserted through the terminal. In another embodiment, the terminal may be adapted with notched projections which engage a circular dovetail in the fastener inserted through the terminal. COPYRIGHT: (C)2008,JPO&INPIT
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