MICROCOMPONENT WITH NANOSTRUCTURED SILICON SURFACE, METHOD FOR PRODUCING IT, AND CONNECTION ARRANGEMENT COMPRISING SUCH MICROCOMPONENTS,申请号EP20060778151-传众专利搜索

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发明名称	MICROCOMPONENT WITH NANOSTRUCTURED SILICON SURFACE, METHOD FOR PRODUCING IT, AND CONNECTION ARRANGEMENT COMPRISING SUCH MICROCOMPONENTS
摘要
申请公布号	EP1910219(A1)	申请公布日期	2008.04.16
申请号	EP20060778151	申请日期	2006.08.03
申请人	TECHNISCHE UNIVERSITAET ILMENAU	发明人	FISCHER, MICHAEL;ALBRECHT, ARNE;STUBENRAUCH, MIKE
分类号	B81C3/00;A44B18/00;F16B5/07	主分类号	B81C3/00
代理机构		代理人
主权项
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