| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for efficiently removing peeling electrostatic charge which is generated when an insulating base plate such as a glass base plate used in a flat panel display is attached to/detached from a base plate fixing stage by using a robot arm. SOLUTION: When the insulating base plate 1 is attached to/detached from the base plate fixing stage 11 by using the robot arm 2 or the like, a timing is controlled for lifting or lowering at least three or more lift pins 12 arranged on the base plate fixing stage 11 which are used for conveying the insulating base plate 1. COPYRIGHT: (C)2008,JPO&INPIT
|
